Example: Layered Targets

He incident on TiO2-Al-Si

This example concerns moderate energy helium ions incident on a layered target, consisting of a layer of titanium dioxide deposited on a layer of aluminum on a silicon substrate.

This figure shows the helium implantation distribution for a layered target. The titanium dioxide layer is 0.01 microns thick, the aluminum 0.03, and the silicon substrate 0.5. A comparison with the code F-TRIDYN[1] is included.

This figure shows the reflected helium angular distributions for a layered target. A comparison with F-TRIDYN is included[1].

Input File

The input file(s) for this simulation is located below:

layered_geometry.toml

layered_geometry_1D.toml

To run this input file, run the 2D version: cargo run --release examples/layered_geometry.toml

Or run the 1D version: cargo run --release 1D examples/layered_geometry_1D.toml in the rustbca directory.

[1] J. Drobny, et al. JNM (2017)